Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/28/2017
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Application #:
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14100224
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Filing Dt:
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12/09/2013
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Publication #:
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Pub Dt:
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06/19/2014
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Inventors:
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Jun YAMAWAKU, Chishio Koshimizu, Yohei Yamazawa, Mitsuhiro Tachibana, Hitoshi Kato et al
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Title:
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FILM FORMATION DEVICE, SUBSTRATE PROCESSING DEVICE, AND FILM FORMATION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU, |
| TOKYO, JAPAN 107-6325 |
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| IPUSA, P.L.L.C |
| 1054 31ST STREET, N.W. |
| SUITE 400 |
| WASHINGTON, DC 20007 |
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