Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/21/2017
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Application #:
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13779992
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Filing Dt:
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02/28/2013
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Publication #:
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Pub Dt:
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08/29/2013
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Inventors:
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Il Gyo KOO, Hyun Jong SHIM
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Title:
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PLASMA BOUNDARY LIMITER UNIT AND APPARATUS FOR TREATING SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| #278, MOSI-RI, JIKSAN-EUP, SEOBUK-GU |
| CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF |
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| JOHN A. CASTELLANO |
| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 8910 |
| RESTON, VA 20195 |
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