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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/21/2017
Application #:
14124034
Filing Dt:
04/22/2014
Publication #:
Pub Dt:
08/21/2014
Inventors:
Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
Title:
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE PRODUCTION METHOD, AND LIGHT POLARIZATION UNIT
Assignment: 1
Reel/Frame:
032730/0238Recorded: 04/22/2014Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/25/2014
Exec Dt:
03/14/2014
Exec Dt:
03/18/2014
Exec Dt:
03/18/2014
Assignee:
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU
TOKYO, JAPAN 100-8331
Correspondent:
MARIO A. COSTANTINO
OLIFF, PLC
P.O. BOX 320850
ALEXANDRIA, VA 22320-4850

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