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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/21/2017
Application #:
15163876
Filing Dt:
05/25/2016
Publication #:
Pub Dt:
03/09/2017
Inventors:
Se-jin Oh, Woong Ko, Vasily Pashkovskiy, Doug-yong Sung, Ki-ho Hwang
Title:
MICROWAVE PROBE, PLASMA MONITORING SYSTEM INCLUDING THE MICROWAVE PROBE, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SYSTEM
Assignment: 1
Reel/Frame:
038714/0855Recorded: 05/25/2016Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/18/2016
Exec Dt:
04/18/2016
Exec Dt:
04/18/2016
Exec Dt:
04/18/2016
Exec Dt:
04/18/2016
Assignee:
129, SAMSUNG-RO
YEONGTONG-GU, GYEONGGI-DO
SUWON-SI, KOREA, REPUBLIC OF 16677
Correspondent:
MYERS BIGEL & SIBLEY, P.A.
PO BOX 37428
RALEIGH, NC 27627

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