Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/04/2017
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Application #:
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14463947
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Filing Dt:
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08/20/2014
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Publication #:
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Pub Dt:
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03/05/2015
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Inventors:
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Munenori Iwami, Ganachev IvanPetrov
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Title:
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ETCHING AMOUNT MEASUREMENT APPARATUS FOR DRY ETCHING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-1 KASAMA 2-CHOME, SAKAE-KU |
| YOKOHAMA-SHI, KANAGAWA-KEN, JAPAN |
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| PEARNE & GORDON, LLP |
| 1801 EAST 9TH STREET |
| SUITE 1200 |
| CLEVELAND, OH 44114 |
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