Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/04/2017
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Application #:
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14395584
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Filing Dt:
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10/20/2014
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Publication #:
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Pub Dt:
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03/26/2015
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Inventors:
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Shigeru Senzaki, Michishige Saito, Daiki Satoh, Ken Horiuchi, Koji Ando, Shingo Koiwa
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Title:
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SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| ROTHWELL, FIGG, ERNST & MANBECK, P.C. |
| 607 14TH STREET, N.W. |
| SUITE 800 |
| WASHINGTON, DC 20005 |
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