Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
04/11/2017
|
Application #:
|
14447203
|
Filing Dt:
|
07/30/2014
|
|
Publication #:
|
|
Pub Dt:
|
02/04/2016
| | | | |
|
Inventors:
|
Adrien LaVoie, Hu Kang, Purushottam Kumar, Shankar Swaminathan, Jun Qian, Frank Pasquale et al
|
|
Title:
|
METHODS AND APPARATUSES FOR SHOWERHEAD BACKSIDE PARASITIC PLASMA SUPPRESSION IN A SECONDARY PURGE ENABLED ALD SYSTEM
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
|
|
|
|
| WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
| 555 12TH STREET |
| SUITE 1700 |
| OAKLAND, CA 94607 |
|
|
Search Results as of:
05/02/2024 03:57 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
