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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
9620377
Issue Dt:
04/11/2017
Application #:
14803578
Filing Dt:
07/20/2015
Publication #:
20160163558
Pub Dt:
06/09/2016
Inventors:
Mark H. Wilcoxson, Hyung Joo Shin, Eric A. Hudson, Kalman Pelhos
Title:
TECHNIQUE TO DEPOSIT METAL-CONTAINING SIDEWALL PASSIVATION FOR HIGH ASPECT RATIO CYLINDER ETCH
Assignment: 1
Reel/Frame:
036258/0110Recorded: 08/05/2015Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
HUDSON, ERIC A.
Exec Dt:
07/16/2015
WILCOXSON, MARK
Exec Dt:
07/16/2015
PELHOS, KALMAN
Exec Dt:
07/17/2015
SHIN, HYUNG JOO
Exec Dt:
07/17/2015
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
WEAVER AUSTIN VILLENEUVE & SAMPSON LLP
P.O. BOX 70250
OAKLAND, CA 94612-0250
Assignment: 2
Reel/Frame:
036259/0742Recorded: 08/05/2015Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
HUDSON, ERIC A.
Exec Dt:
07/16/2015
WILCOXSON, MARK
Exec Dt:
07/16/2015
PELHOS, KALMAN
Exec Dt:
07/17/2015
SHIN, HYUNG JOO
Exec Dt:
07/17/2015
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
WEAVER AUSTIN VILLENEUVE & SAMPSON LLP
P.O. BOX 70250
OAKLAND, CA 94612-0250
Assignment: 3
Reel/Frame:
036294/0073Recorded: 08/06/2015Pages: 7
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE APPLICATION NO. PREVIOUSLY RECORDED ON REEL 036258 FRAME 0110. ASSIGNOR(S) HEREBY CONFIRMS THE CORRECT APPLICATION NO. IS 14/803,578.
Assignors:
HUDSON, ERIC A.
Exec Dt:
07/16/2015
WILCOXSON, MARK
Exec Dt:
07/16/2015
PELHOS, KALMAN
Exec Dt:
07/17/2015
SHIN, HYUNG JOO
Exec Dt:
07/17/2015
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
WEAVER AUSTIN VILLENEUVE & SAMPSON LLP
P.O. BOX 70250
OAKLAND, CA 94612-0250

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