Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/25/2017
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Application #:
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13944353
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Filing Dt:
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07/17/2013
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Publication #:
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Pub Dt:
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01/22/2015
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Inventors:
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He-Hui PENG, Fu-Ming HUANG, Shich-Chang SUEN, Han-Hsin KUO, Chi-Ming TSAI et al
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Title:
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MECHANISMS FOR REMOVING DEBRIS FROM POLISHING PAD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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