Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/09/2017
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Application #:
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14816637
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Filing Dt:
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08/03/2015
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Publication #:
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Pub Dt:
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02/04/2016
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Inventors:
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Takuro KOSAKA, Yukio INAZUKI, Hideo KANEKO, Toyohisa SAKURADA
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Title:
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HALFTONE PHASE SHIFT PHOTOMASK BLANK AND MAKING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-1, OHTEMACHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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