Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/09/2017
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Application #:
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14712663
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Filing Dt:
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05/14/2015
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Publication #:
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Pub Dt:
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11/17/2016
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Inventors:
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Hua Song, Cheng En Wu, James P. Shiely
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Title:
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3D RESIST PROFILE AWARE ETCH-BIAS MODEL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 700 E. MIDDLEFIELD ROAD |
| MOUNTAIN VIEW, CALIFORNIA 94043 |
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| A. RICHARD PARK |
| PARK, VAUGHAN, FLEMING & DOWLER LLP |
| 2820 FIFTH STREET |
| DAVIS, CA 95618 |
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