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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9659751
Issue Dt:
05/23/2017
Application #:
14341492
Filing Dt:
07/25/2014
Publication #:
20160027616
Pub Dt:
01/28/2016
Inventors:
KARTIK RAMASWAMY, STEVEN LANE, JOSEPH F. AUBUCHON, YANG YANG, LAWRENCE WONG, TRAVIS KOH
Title:
SYSTEM AND METHOD FOR SELECTIVE COIL EXCITATION IN INDUCTIVELY COUPLED PLASMA PROCESSING REACTORS
Assignment: 1
Reel/Frame:
033524/0745Recorded: 08/13/2014Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
RAMASWAMY, KARTIK
Exec Dt:
08/04/2014
YANG, YANG
Exec Dt:
08/04/2014
LANE, STEVEN
Exec Dt:
08/04/2014
WONG, LAWRENCE
Exec Dt:
08/04/2014
AUBUCHON, JOSEPH F.
Exec Dt:
08/04/2014
KOH, TRAVIS
Exec Dt:
08/04/2014
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
MOSER TABOADA/ALAN TABOADA
1030 BROAD STREET
SUITE 203
SHREWSBURY, NJ 07702

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