Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/30/2017
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Application #:
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15083292
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Filing Dt:
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03/29/2016
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Publication #:
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Pub Dt:
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01/26/2017
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Inventors:
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Jin Xu, Qiyan Feng, Yu Ren, Yukun Lv, Xusheng Zhang
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Title:
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METHOD FOR ESTABLISHING MAPPING RELATION IN STI ETCH AND CONTROLLING CRITICAL DIMENSION OF STI
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 497 GAOSI ROAD, ZHANGJIANG HI-TECH PARK, PUDONG |
| SHANGHAI, CHINA 201210 |
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| SHANGHAI HUALI MICROELECTRONICS CORPORATION |
| 497 GAOSI ROAD, ZHANGJIANG HI-TECH PARK, PUDONG |
| SHANGHAI, 201210 CHINA |
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