Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/13/2017
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Application #:
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14762451
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Filing Dt:
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07/21/2015
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Publication #:
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Pub Dt:
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12/17/2015
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PCT #:
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US2014023770
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Inventors:
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Roy NANGOY, Dmitry LUBOMIRSKY
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Title:
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MULTI ZONE HEATING AND COOLING ESC FOR PLASMA PROCESS CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| VANESSA L. YAZICIGIL |
| 1279 OAKMEAD PARKWAY |
| SUNNYVALE, CA 94085-4040 |
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