Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/27/2017
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Application #:
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14699216
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Filing Dt:
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04/29/2015
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Publication #:
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Pub Dt:
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11/26/2015
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Inventors:
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Hiroshi MATSUMOTO, Munehiro OGASAWARA, Ryoichi YOSHIKAWA
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Title:
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MULTI CHARGED PARTICLE BEAM WRITING METHOD, AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8-1 SHIN SUGITA CHO, ISOGO-KU |
| YOKOHAMA, KANAGAWA, JAPAN 235-8522 |
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| OBLON, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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