Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/18/2017
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Application #:
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14632311
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Filing Dt:
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02/26/2015
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Publication #:
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Pub Dt:
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08/27/2015
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Inventors:
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Kippei SUGITA, Tatsuya YAMAGUCHI, Yoshinori MORISADA, Makoto FUJIKAWA
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Title:
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METHOD FOR IMPROVING CHEMICAL RESISTANCE OF POLYMERIZED FILM, POLYMERIZED FILM FORMING METHOD, FILM FORMING APPARATUS, AND ELECTRONIC PRODUCT MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| NATH, GOLDBERG & MEYER |
| 112 S WEST STREET |
| 33762U_JLM_HP |
| ALEXANDRIA, VA 22314 |
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