Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/18/2017
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Application #:
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14268098
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Filing Dt:
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05/02/2014
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Publication #:
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Pub Dt:
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11/05/2015
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Inventors:
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Eric A. Joseph, Goh Matsuura, Masahiro Nakamura, Edmund M. Sikorski, Bang N. To
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Title:
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ETCH RATE ENHANCEMENT FOR A SILICON ETCH PROCESS THROUGH ETCH CHAMBER PRETREATMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| SCULLY, SCOTT, MURPHY & PRESSER, P.C. |
| 400 GARDEN CITY PLAZA |
| SUITE 300 |
| GARDEN CITY, NY 11530 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-6-2 MARUNOUCHI, CHIYODA-KU |
| TOKYO, JAPAN 100-8246 |
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| SCULLY, SCOTT, MURPHY & PRESSER, P.C. |
| 400 GARDEN CITY PLAZA |
| SUITE 300 |
| GARDEN CITY, NY 11530 |
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