Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/08/2017
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Application #:
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14633025
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Filing Dt:
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02/26/2015
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Publication #:
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Pub Dt:
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09/01/2016
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Inventors:
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Angel Yanguas-Gil, Jeffrey W. Elam
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Title:
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FAST METHOD FOR REACTOR AND FEATURE SCALE COUPLING IN ALD AND CVD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5801 SOUTH ELLIS AVENUE |
| CHICAGO, ILLINOIS 60637 |
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| MATTHEW E. MARTIN |
| 3000 K STREET N.W., SUITE 600 |
| FOLEY & LARDNER LLP |
| WASHINGTON, DC 20007 |
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