Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/12/2017
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Application #:
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14447060
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Filing Dt:
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07/30/2014
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Publication #:
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Pub Dt:
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02/05/2015
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Inventors:
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Kazuhide HASEBE, Kazuya TAKAHASHI, Katsuhiko KOMORI, Yoshikazu FURUSAWA et al
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Title:
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Silicon Film Forming Method, Thin Film Forming Method and Cross-Sectional Shape Control Method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME |
| TOKYO, JAPAN 1076325 |
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| NATH, GOLDBERG & MEYER |
| 112 S. WEST STREET |
| ALEXANDRIA, VA 22314 |
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