Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/26/2017
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Application #:
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14468066
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Filing Dt:
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08/25/2014
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Publication #:
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Pub Dt:
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03/05/2015
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Inventors:
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Tae Seung Cho, Yi-Heng Sen, Soonam Park, Dmitry Lubomirsky
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Title:
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DUAL DISCHARGE MODES OPERATION FOR REMOTE PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| KILPATRICK TOWNSEND & STOCKTON LLP / AMA |
| 1100 PEACHTREE STREET |
| SUITE 2800 |
| ATLANTA, GA 30309 |
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