Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/26/2017
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Application #:
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14649673
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Filing Dt:
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06/04/2015
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Publication #:
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Pub Dt:
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06/16/2016
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Inventors:
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Ikuo SUNAKA, Katsuhiro MORIKAWA, Suguru ENOKIDA
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Title:
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF DETECTING ABNORMALITY IN TRANSPORT CONTAINER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| BURR & BROWN, PLLC |
| PO BOX 7068 |
| SYRACUSE, NY 13261-7068 |
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