Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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10/17/2017
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Application #:
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15210256
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Filing Dt:
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07/14/2016
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Inventors:
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Masaru Zaitsu, Nobuyoshi Kobayashi, Akiko Kobayashi, Masaru Hori, Hiroki Kondo et al
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Title:
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METHOD OF CYCLIC DRY ETCHING USING ETCHANT FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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| SNELL & WILMER L.L.P. (ASM JAPAN) |
| ONE ARIZONA CENTER |
| 400 EAST VAN BUREN STREET |
| PHOENIX, AZ 85004-2202 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FURO-CHO, CHIKUSA-KU |
| NAGOYA, JAPAN 464-8601 |
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| SNELL & WILMER L.L.P. (ASM JAPAN) |
| ONE ARIZONA CENTER |
| 400 EAST VAN BUREN STREET |
| PHOENIX, AZ 85004-2202 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8, 1322 AP |
| ALMERE, NETHERLANDS |
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| SNELL & WILMER L.L.P. |
| 400 EAST VAN BUREN STREET, SUITE 1900 |
| ONE ARIZONA CENTER |
| PHOENIX, AZ 85004-2202 |
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