Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/14/2017
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Application #:
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14517623
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Filing Dt:
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10/17/2014
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Publication #:
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Pub Dt:
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04/21/2016
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Inventors:
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Thorsten Lill, Vahid Vahedi, Candi Kristoffersen, Andrew D. Bailey III, Meihua Shen et al
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Title:
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EQUIPMENT FRONT END MODULE FOR TRANSFERRING WAFERS AND METHOD OF TRANSFERRING WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BUCHANAN INGERSOLL & ROONEY PC - LAM RES |
| 1737 KING STREET, SUITE 500 |
| ALEXANDRIA, VA 22314 |
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