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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/21/2017
Application #:
14165334
Filing Dt:
01/27/2014
Publication #:
Pub Dt:
07/31/2014
Inventors:
Dries SMEETS, Arno Jan Bleeker, Christopher James Lee, Pieter Willem Herman De Jager et al
Title:
RADIATION MODULATOR FOR A LITHOGRAPHY APPARATUS, A LITHOGRAPHY APPARATUS, A METHOD OF MODULATING RADIATION FOR USE IN LITHOGRAPHY, AND A DEVICE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
032650/0112Recorded: 04/10/2014Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/10/2014
Exec Dt:
03/13/2014
Exec Dt:
03/10/2014
Exec Dt:
03/10/2014
Exec Dt:
03/17/2014
Exec Dt:
04/03/2014
Assignee:
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondent:
PILLSBURY WINTHROP SHAW PITTMAN, LLP
P.O. BOX 10500
MCLEAN, VA 22102

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