Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/28/2017
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Application #:
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15343768
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Filing Dt:
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11/04/2016
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Inventors:
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Igor V. Fomenkov, Robert Jay Rafac
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Title:
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EUV LPP SOURCE WITH DOSE CONTROL AND LASER STABILIZATION USING VARIABLE WIDTH LASER PULSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| 5500 AH VELDHOVEN, NETHERLANDS |
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| GARD & KASLOW LLP |
| 4 MAIN STREET, SUITE 20 |
| LOS ALTOS, CA 94022 |
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