Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/12/2017
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Application #:
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15616582
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Filing Dt:
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06/07/2017
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Publication #:
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Pub Dt:
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09/21/2017
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Inventors:
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Koji MAEDA, Soichi ISOBE, Hiroshi SHIMOMOTO, Hideaki TANAKA
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Title:
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SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OHTA-KU |
| TOKYO, JAPAN |
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| BAKER & HOSTETLER |
| 999 THIRD AVENUE SUITE 3600 |
| SEATTLE, WA 98104 |
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