Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/02/2018
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Application #:
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15179792
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Filing Dt:
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06/10/2016
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Publication #:
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Pub Dt:
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12/14/2017
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Inventors:
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Qing XU, Sangjun PARK, Zhongkui TAN, Qian FU
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Title:
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LINE EDGE ROUGHNESS IMPROVEMENT WITH PHOTON-ASSISTED PLASMA PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER LAW GROUP LLP |
| P.O. BOX 51887 |
| PALO ALTO, CA 94303-1887 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 500 DILLER AVENUE |
| NEW HOLLAND, PENNSYLVANIA 17557 |
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| CNH INDUSTRIAL AMERICA LLC |
| 700 STATE STREET |
| IP LAW DEPARTMENT |
| RACINE, WI 53404 |
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