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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/09/2018
Application #:
15066676
Filing Dt:
03/10/2016
Publication #:
Pub Dt:
10/06/2016
Inventor:
Paul Kaiser
Title:
Method for Regulating a Light Source of a Photolithography Exposure System and Exposure Assembly for a Photolithography Device
Assignment: 1
Reel/Frame:
037949/0516Recorded: 03/10/2016Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
02/02/2016
Assignee:
SCHLEISSHEIMER STRASSE 90
GARCHING, GERMANY 85748
Correspondent:
HAYES SOLOWAY PC
175 CANAL STREET
MANCHESTER, NH 03101

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