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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
Issue Dt:
02/27/2018
Application #:
14311420
Filing Dt:
06/23/2014
Publication #:
Pub Dt:
01/01/2015
Inventors:
Thomas Frank, Dirk Doering, Holger Seitz, Mario Laengle, Ulrich Matejka
Title:
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM COMPRISING SUCH AN ILLUMINATION OPTICAL UNIT
Assignment: 1
Reel/Frame:
033406/0907Recorded: 07/29/2014Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/03/2014
Exec Dt:
07/03/2014
Exec Dt:
07/16/2014
Exec Dt:
07/04/2014
Assignee:
CARL-ZEISS-PROMENADE 10
07745 JENA, GERMANY
Correspondent:
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
033406/0923Recorded: 07/29/2014Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
07/04/2014
Assignee:
DEP. CLP-PS
73446 OBERKOCHEN, GERMANY
Correspondent:
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 3
Reel/Frame:
040069/0705Recorded: 09/19/2016Pages: 7
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
05/12/2015
Assignee:
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
MARC WEFERS
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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