Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/06/2018
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Application #:
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15309508
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Filing Dt:
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11/08/2016
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Publication #:
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Pub Dt:
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06/01/2017
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Inventors:
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Hiroyuki SHINOZAKI, Shuichi SUEMASA, Yutaka KOBAYASHI
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Title:
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POLISHING TABLE REPLACEMENT APPARATUS, POLISHING TABLE REPLACEMENT METHOD, AND APPARATUS FOR REPLACING A COMPONENT OF SEMICONDUCTOR-DEVICE MANUFACTURING MACHINE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OHTA-KU |
| TOKYO, JAPAN 144-8510 |
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| LEYDIG, VOIT & MAYER, LTD |
| TWO PRUDENTIAL PLAZA, SUITE 4900 |
| 180 NORTH STETSON AVENUE |
| CHICAGO, IL 60601-6731 |
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