Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/20/2018
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Application #:
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14689129
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Filing Dt:
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04/17/2015
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Publication #:
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Pub Dt:
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11/05/2015
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Inventors:
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Yasuyuki Ido, Naoki Shindo, Takehiko Orii, Keisuke Egashira, Yosuke Hachiya et al
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Title:
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SUBSTRATE LIQUID PROCESSING APPARATUS HAVING NOZZLE WITH MULTIPLE FLOW PATHS AND SUBSTRATE LIQUID PROCESSING METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-6325, JAPAN |
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| ABELMAN, FRAYNE & SCHWAB/LEE |
| 666 THIRD AVENUE |
| 10TH FLOOR |
| NEW YORK, NY 10017-5621 |
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