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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9927094
Issue Dt:
03/27/2018
Application #:
13741566
Filing Dt:
01/15/2013
Publication #:
20130181595
Pub Dt:
07/18/2013
Inventors:
Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine et al
Title:
PLASMA CELL FOR PROVIDING VUV FILTERING IN A LASER-SUSTAINED PLASMA LIGHT SOURCE
Assignment: 1
Reel/Frame:
030027/0490Recorded: 03/18/2013Pages: 13
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BEZEL, ILYA
Exec Dt:
02/11/2013
SHCHEMELININ, ANATOLY
Exec Dt:
02/11/2013
SHIFRIN, EUGENE
Exec Dt:
02/14/2013
PANZER, MATTHEW
Exec Dt:
02/12/2013
DERSTINE, MATTHEW
Exec Dt:
03/12/2013
WANG, JINCHENG
Exec Dt:
03/04/2013
CHIMMALGI, ANANT
Exec Dt:
03/06/2013
PATIL, RAJEEV
Exec Dt:
02/27/2013
BRUNNER, RUDOLF
Exec Dt:
02/27/2013
Assignee:
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondent:
SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER
14301 FNB PARKWAY
SUITE 220
OMAHA, NE 68154-5299

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