Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/10/2018
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Application #:
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13547275
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Filing Dt:
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07/12/2012
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Publication #:
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Pub Dt:
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01/16/2014
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Inventors:
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Kuo-Yin Lin, Chih-I Peng, Kun-Tai Wu, Teng-Chun Tsai, Hsiang-Pi Chang et al
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Title:
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AIR PURGE CLEANING FOR SEMICONDUCTOR POLISHING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN ROAD 6 |
| HSIN-CHU SCIENCE PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| COOPER LEGAL GROUP LLC |
| 6505 ROCKSIDE ROAD |
| SUITE 330 |
| INDEPENDENCE, OH 44131 |
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