Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/01/2018
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Application #:
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14484613
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Filing Dt:
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09/12/2014
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Publication #:
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Pub Dt:
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03/19/2015
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Inventors:
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Kazuya Daito, GWO-CHUAN TZU, SANG-HYEOB LEE
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Title:
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APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| MOSER TABOADA/LEONARD P. LINARDAKIS |
| 1030 BROAD STREET |
| SUITE 203 |
| SHREWSBURY, NJ 07702 |
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