Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
06/05/2018
|
Application #:
|
15421189
|
Filing Dt:
|
01/31/2017
|
|
Publication #:
|
|
Pub Dt:
|
08/10/2017
| | | | |
|
Inventors:
|
Zhongkui Tan, Ying Wu, Yiting Zhang, Qing Xu, Yoko Yamaguchi, Qian Fu, Lin Cui
|
|
Title:
|
ATOMIC LAYER ETCHING IN CONTINUOUS PLASMA
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
|
|
|
|
| WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
| PO BOX 70250 |
| OAKLAND, CA 94612-0250 |
|
|
Search Results as of:
04/26/2024 11:44 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
