Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/01/2000
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Application #:
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29098986
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Filing Dt:
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01/09/1999
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Inventors:
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ALLEN FLANIGAN, STEVEN SANSONI, VINCENT E. BURKHART
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Title:
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ELECTROSTATIC CHUCK WITH IMPROVED SPACING MASK AND WORKPIECE DETECTION DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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APPLIED MATERIALS, INC. |
ROBERT W. MULCAHY |
P.O. BOX 450A |
SANTA CLARA, CA 95052 |
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