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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/25/2002
Application #:
29131294
Filing Dt:
10/19/2000
Inventors:
Jun Hirose, Eiji Hirose, Jun Ozawa, Takaaki Hirooka
Title:
Multi-chamber processing apparatus
Assignment: 1
Reel/Frame:
011561/0860Recorded: 03/01/2001Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/13/2001
Exec Dt:
01/13/2001
Exec Dt:
01/13/2001
Exec Dt:
01/13/2001
Assignee:
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN
Correspondent:
FINNEGAN, HENDERSON, FARABOW, ET AL.
LAWRENCE F. GALVIN, ESQ.
1300 I STREET, N.W.
WASHINGTON, D.C. 20005-3315

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