Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/24/2009
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Application #:
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29276663
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Filing Dt:
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02/01/2007
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Inventors:
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Yasuharu SASAKI, Mamoru Kosakai
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Title:
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ATTRACTING PLATE OF AN ELECTROSTATIC CHUCK FOR SEMICONDUCTOR MANUFACTURING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| 6-28 ROKUBAN-CHO, CHIYODA-KU |
| TOKYO, JAPAN 102-0085 |
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| OBLON, SPIVAK, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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