Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/10/2020
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Application #:
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29705011
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Filing Dt:
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09/09/2019
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Inventors:
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Toru KAGAYA, Atsushi UMEKAWA
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Title:
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INNER TUBE OF REACTOR FOR SEMICONDUCTOR FABRICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| KANDA KAJICHO BUILDING, 3-4 KANDA KAJI-CHO, CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| FITCH, EVEN, TABIN & FLANNERY, LLP |
| 120 SOUTH LASALLE STREET, SUITE 2100 |
| CHICAGO, IL 60603-3406 |
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