Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/07/2023
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Application #:
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29773972
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Filing Dt:
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03/12/2021
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Inventors:
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Tetsuya KOSUGI, Takuto SHOJI, Shinobu SUGIURA, Yuya YOSHIMURA
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Title:
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CEILING HEATER FOR SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO, CHIYODA-KU |
| TOKYO, JAPAN |
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| FITCH, EVEN, TABIN, AND FLANNERY |
| 120 SOUTH LASALLE STREET, SUITE 2100 |
| CHICAGO, IL 60603 |
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04/30/2024 06:13 AM
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