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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/04/1995
Application #:
08011353
Filing Dt:
01/29/1993
Inventor:
KAZUYA OTA
Title:
METHOD FOR DETECTING POSITIONS OF PHOTOMASK AND SUBSTRATE
Assignment: 1
Reel/Frame:
006421/0553Recorded: 01/29/1993Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST.
Assignor:
Exec Dt:
01/25/1993
Assignee:
2-3, MARUNOUCHI 3-CHOME CHIYODA-KU
TOKYO 100, JAPAN
Correspondent:
NELSON H. SHAPIRO
SHAPIRO AND SHAPIRO
1100 WILSON BOULEVARD
SUITE 1701
ARLINGTON, VA 22209

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