Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/06/1988
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Application #:
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06895132
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Filing Dt:
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08/11/1986
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Inventors:
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TOSHIO MATSUURA, KYOICHI SUWA, HISAYUKI SHIMIZU, AKIKAZU TANIMOTO
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Title:
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EXPOSURE APPARATUS FOR PRODUCTION OF INTEGRATED CIRCUIT
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Assignment:
1
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). EFFECTIVE APR. 1, 1988
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SHAPIRO AND SHAPIRO |
1100 WILSON BOULEVARD |
SUITE 1701 |
ARLINGTON, VIRGINIA 22209 |
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