Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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09748226
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Filing Dt:
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12/27/2000
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Publication #:
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Pub Dt:
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07/05/2001
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Inventor:
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Toru Koike
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Title:
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MISALIGNMENT INSPECTION METHOD, CHARGE BEAM EXPOSURE METHOD, AND SUBSTRATE FOR PATTERN OBSERVATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 72 HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, ET. AL. |
| MR. ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, DC 20005-3315 |
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