Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/28/2003
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Application #:
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09753517
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Filing Dt:
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01/04/2001
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Publication #:
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Pub Dt:
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07/05/2001
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Inventors:
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Satoshi Okazaki, Ichiro Kaneko, Jiro Moriya, Masayuki Suzuki, Tamotsu Maruyama
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Title:
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PHASE SHIFT MASK BLANK, PHASE SHIFT MASK AND METHOD OF MANUFACTURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-1, OTEMACHI, 2-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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| MILLER, WHITE, ZELANO ET AL |
| TRACY A. LUKE |
| 2200 CLARENDON BLVD., SUITE 1400 |
| ARLINGTON COURT PLAZA I |
| ARLINGTON, VA 22201 |
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