Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09769256
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Filing Dt:
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01/26/2001
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Publication #:
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Pub Dt:
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08/02/2001
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Inventors:
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Terushige Takeyama, Nobuhito Miyauchi, Takashi Shiba
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Title:
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Substrate transfer apparatus of substrate processing system
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8-1, YOSUYA 5-CHOME |
| FUCHU-SHI, TOKYO, JAPAN |
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| OLIFF & BERRIDGE, PLC. |
| JAMES A. OLIFF |
| PO BOX 19928 |
| ALEXANDRIA, VA 22320 |
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