Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09080254
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Filing Dt:
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05/18/1998
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Publication #:
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Pub Dt:
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08/16/2001
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Inventors:
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KENICHI YAMAGA, YUJI ONO, MASAHIRO MIYASHITA, OSAMU TANIGAWA
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Title:
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WAFER PROCESSING APPARATUS, METHOD OF OPERATING THE SAME AND WAFER DETECTING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| BEVERIDGE, DEGRANDI, WEILACHER ETAL LLP |
| MICHAEL A. MAKUCH |
| 1850 M STREET, N.W., SUITE 800 |
| WASHINGTON, DC 20036 |
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