Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09749865
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Filing Dt:
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12/27/2000
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Publication #:
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Pub Dt:
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08/23/2001
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Inventors:
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Noriyuki Hirayanagi, Hajime Yamamoto, Tomoharu Fujiwara
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Title:
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Wafer chucks allowing controlled reduction of substrate heating and rapid substrate exchange
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJI BUILDING |
| 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN CAMPBELL ET AL |
| DONALD L. STEPHENS JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 121 S.W. SALMON STREET |
| PORTLAND, OREGON 97204-2988 |
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