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Patent Assignment Abstract of Title

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Total Assignments: 7

Patent #:	6461428	Issue Dt:	10/08/2002	Application #:	09729669	Filing Dt:	12/05/2000
Publication #:	20010020439	Pub Dt:	09/13/2001
Inventors:	Shyuji Tobashi, Tadashi Ohashi, Katsuyuki Iwata, Hiroyuki Saito, Shinichi Mitani et al
Title:	METHOD AND APPARATUS FOR CONTROLLING RISE AND FALL OF TEMPERATURE IN SEMICONDUCTOR SUBSTRATES

Assignment: 1

Reel/Frame:

011711/0983

Recorded: 04/16/2001

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

TOBASHI, SHYUJI

Exec Dt:

11/24/2000

OHASHI, TADASHI

Exec Dt:

12/20/2000

IWATA, KATSUYUKI

Exec Dt:

12/22/2000

SAITO, HIROYUKI

Exec Dt:

12/12/2000

MITANI, SHINICHI

Exec Dt:

12/28/2000

HONDA, TAKAAJI

Exec Dt:

01/10/2001

ARAI, HIDEKI

Exec Dt:

12/28/2000

MUROFUSHI, YOSHITAKA

Exec Dt:

12/28/2000

SUZUKI, KUNIHIKO

Exec Dt:

12/28/2000

TAKAHASHI, HIDENORI

Exec Dt:

12/28/2000

ITO, HIDEKI

Exec Dt:

12/28/2000

KATSUMATA, HIROFUMI

Exec Dt:

12/28/2000

Assignees:

TOSHIBA CERAMICS CO., LTD.

5-25, NISHI-SHINJUKU 7-CHOME SHINJUKU-KU

TOKYO, 163-0023, JAPAN

TOSHIBA KIKAI KABUSHIKIKAISHA

2-11, GINZA 4-CHOME, CHUUOU-KU

TOKYO, 104-0061, JAPAN

Correspondent:

FOLEY & LARDNER

RICHARD L. SCHWAAB

WASHINGTON HARBOUR

3000 K STREET, N.W., SUITE 500

WASHINGTON, D.C. 20007-5109

Assignment: 2

Reel/Frame:

018291/0382

Recorded: 09/22/2006

Pages: 3

Conveyance:

CHANGE OF ADDRESS

Assignor:

TOSHIBA CERAMICS CO., LTD.

Exec Dt:

04/20/2006

Assignee:

TOSHIBA CERAMICS CO., LTD.

6-3, OHSAKI 1-CHOME, SHINAGAWA-KU

TOKYO, JAPAN

Correspondent:

RICHARD L. SCHWAAB

3000 K STREET, N.W.

SUITE 500

WASHINGTON, DC 20007-5143

Assignment: 3

Reel/Frame:

018120/0348

Recorded: 08/15/2006

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

TOSHIBA KIKAI KABUSHIKIKAISHA

Exec Dt:

06/02/2006

Assignee:

NUFLARE TECHNOLOGY, INC.

2068-3, OOKA, NUMAZU-SHI

SHIZUOKA-KEN, JAPAN

Correspondent:

RICHARD L. SCHWAAB

FOLEY & LARDNER LLP

WASHINGTON HARBOUR

3000 K STREET NW, SUITE 500

WASHINGTON, D.C. 20007-5143

Assignment: 4

Reel/Frame:

019817/0749

Recorded: 09/13/2007

Pages: 17

Conveyance:

MERGER (SEE DOCUMENT FOR DETAILS).

Assignor:

TOSHIBA CERAMICS CO., LTD.

Exec Dt:

06/01/2007

Assignee:

COVALENT MATERIALS CORPORATION

6-3, OHSAKI 1-CHOME, SHINAGAWA-KU

TOKYO, JAPAN

Correspondent:

DAVID J. CUSHING - SUGHRUE MION PLLC

20-20, KAIGAN 3-CHOME, MINATO-KU

SUITE 800

WASHINGTON, D.C, DC 20037

Assignment: 5

Reel/Frame:

029962/0497

Recorded: 03/11/2013

Pages: 4

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

COVALENT MATERIALS CORPORATION

Exec Dt:

12/26/2012

Assignee:

COVALENT SILICON CORPORATION

6-861-5, SEIRO-MACHI HIGASHIKO

KITAKANBARA-GUN

NIIGATA, JAPAN 957-0197

Correspondent:

ROBERT G. MUKAI

1737 KING STREET

SUITE 500

ALEXANDRIA, VA 22314

Assignment: 6

Reel/Frame:

032165/0972

Recorded: 02/06/2014

Pages: 17

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT THE PATENT WHERE ASSIGNMENT WAS RECORDED. IT SHOULD NOT HAVE BEEN RECORDED IN PATENT NO. 6,161,428, PREVIOUSLY RECORDED ON REEL 029991 FRAME 0421. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT SHOULD HAVE BEEN RECORDED IN PATENT NO. 6,461,428. PLEASE REMOVE THE RECORDATION FROM 6,161,428.

Assignor:

COVALENT SILICON CORPORATION

Exec Dt:

01/07/2013

Assignee:

GLOBALWAFERS JAPAN CO., LTD.

6-861-5, SEIRO-MACHI HIGASHIKO

KITAKANBARA-GUN

NIIGATA, JAPAN 957-0197

Correspondent:

BUCHANAN INGERSOLL & ROONEY PC

1737 KING STREET

SUITE 500

ALEXANDRIA, VA 22314

Assignment: 7

Reel/Frame:

032601/0550

Recorded: 04/04/2014

Pages: 2

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

GLOBALWAFERS JAPAN CO., LTD.

Exec Dt:

02/27/2014

Assignee:

NUFLARE TECHNOLOGY, INC.

8-1 SHIN SUGITA CHO, ISOGO-KU

YOKOHAMA

KANAGAWA, JAPAN 235-8522

Correspondent:

BUCHANAN INGERSOLL & ROONEY PC

1737 KING STREET

SUITE 500

ALEXANDRIA, VA 22553

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