Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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09754841
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Filing Dt:
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01/03/2001
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Publication #:
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Pub Dt:
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10/04/2001
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Inventors:
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Michael Gerhard, Nils Dieckmann, Christine Sieler, Marcus Zehetbauer, Martin Schriever et al
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Title:
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PROCESS FOR THE DECONTAMINATION OF MICROLITHOGRAPHIC PROJECTION EXPOSURE DEVICES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| D-89518 HEIDENHEIM (BRENZ), GERMANY |
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| M. ROBERT KESTENBAUM |
| 11011 BERMUDA DUNES NE |
| ALBUQUERQUE, NM 87111 |
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Assignment:
2
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| CARL-ZEISS-STRASSE |
| OBERKOCHEN, GERMANY 73447 |
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| THOMAS S. BAKER, JR. |
| 1371 WEST 3RD AVENUE |
| COLUMBUS, OH 43212 |
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