Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09824875
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Filing Dt:
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04/04/2001
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Publication #:
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Pub Dt:
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10/11/2001
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Inventors:
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Shinichi Hamaguchi, Takeshi Haraguchi, Hiroshi Yasuda
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Title:
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Multi-beam exposure apparatus using a multi-axis electron lens, fabrication method of a multi-axis electron lens and fabrication method of a semiconductor device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-32-1 ASAHI-CHO NERIMA-KU |
| TOKYO, JAPAN |
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| PILLSBURY WINTHROP LLP |
| GLENN J. PERRY |
| 1100 NEW YORK AVENUE, NW |
| NINTH FLOOR |
| WASHINGTON, DC 20005-3918 |
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